MEMS technology accelerates into the sensor era

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MEMS technology accelerates into the sensor era

June 28
06:14 2022

Humanity has entered the information age, and it has also entered the sensor age. In modern control systems, sensors are located at the interface between the measured object and the test system, and can learn about the measured object indirectly or indirectly. It is the “window” of information output, the eye of the interconnection of all things, and the only functional device for data information collection, which indirectly affects and fits the performance of the system. In particular, the realization of various technologies in the Internet of Things, small data, cloud computing, and even smart cities has attracted international attention, especially limited to sensor technology.


Standard Controversial Sensor

Currently, there are approximately 26,000 sensors worldwide. Due to the lack of guidelines and specifications for the development of international standards, there is currently no authoritative type of sensor standard. At present, the industry can be divided into intuitive physical sensors, chemical sensors, and biosensors due to differences in complex mechanisms and complex materials, as well as industrial site environments, usage scenarios, and the characteristics of detection media, individual parameters, and simple structures. Since then, the sensor has been in the state of multi-variety and small batch production. Due to the dispersion and complexity of process technology and the low price of equipment, the industry refers to its production process as making “industrial crafts”.


MEMS technology is a source of creativity in Silicon Valley’s sensor field

On the basis of MEMS technology, various sensor products with different packaging structures have been created according to the needs of different industries and functions. It has been nearly 25 years, and various sensor products have been produced.

Currently, there are 4-inch, 6-inch, 8-inch and 12-inch MEMS maturity-stage processes. With the upgrade of semiconductor planar technology, the maturity level of process equipment and devices increases, and prices continue to drop. Products are widely used in physical, chemical and biological sensors, and have matured in acoustic, photosensitive, thermal, force-sensitive, magnetic, gas, humidity, pressure, ion-sensitive and other sensors. It not only improves the industrialization ability and reduces the product cost, but also greatly improves the reliability, stability and consistency of the product.

The United States clearly puts forward three core technologies and innovation trends of sensor intelligence:

  • MEMS process technology. Lightweight, high power consumption, high cost, residual material mixing, residual parameter integration, large-scale integrated process technology and equipment, micron and submicron low-precision control technology, flexible production process technology, etc.

  • wireless network technology. In order to cooperate with the promotion and application of various Internet of Things (sensor network) technologies, develop industrial Internet, artificial intelligence technology, intelligent travel terminals, and wireless networking sensor products and technological innovations under 5G technology standards.

  • Micro energy harvesting technology. In the process of indoor and outdoor use of sensor smart nodes, especially in the field environment, the problem of power supply has always been the main obstacle to its popularization and application in various fields. Committed to the collection and acquisition of wind energy, light energy, electromagnetic energy and other micro energy in nature, it is called “micro energy capture technology”.

Industrialization Features

Technology and market silos and fragmentation are key to sensor innovation. This requires the use of common basic technologies and processes to establish a production system of agile production, process standardization, and product standardization, and to find a facility market for products. According to the characteristics of MEMS process technology and product market application, the seven categories of thermal, acoustic, force-sensitive, photosensitive, gas-sensitive, magnetic-sensitive, and frequency-sensitive products meet the recommendations for industrialization and market scale, and industrial scale production can be built.


Big industry is big strategy

At present, the domestic sensor output value exceeds 100 million yuan, accounting for only 13% of the total number of enterprises. In view of the current situation, characteristics and applicable problems of the domestic industry, combined with the characteristics of sensor technology and process, it is expected that dozens of sensor companies and scientific research institutes will gather in the industry. industrial clusters or bases with industrial scale advantages and international market influence. At the same time, it has a six-dimensional ecological environment integrating government, production, learning, research, application, and commerce, and builds the transformation of industrial clusters, resulting in the “dual ecology” of Chinese sensors. industrial chain. Sensor Valley is an industry with distinctive features and obvious location advantages. A striking international sensor industrial park.

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